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Brief introduction: by using the processing technology of MEMS, the high-temperature resistant materials are manufactured into vibration starting elements by twice "plating etching" technology, which can effectively measure the vibration frequency data of objects under high temperature conditions.
(Patent No.: 201510697763.0)
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[patentee]
Tsinghua University
Address: Haidian District, Beijing
Box 82, 100084, Patent Office of Tsinghua University
[inventor]
Tang Feima Dawei, Wang Xiaohao
[Abstract of invention]
A kind of starting element and its preparation method for vibration sensor under high temperature condition, the starting element includes the support of starting element, double cantilever folding beam and starting mass block; the double cantilever folding beam is composed of two single cantilever folding beams, two single cantilever folding beams are symmetrically arranged with the starting mass block as the center; one end of each single cantilever folding beam is respectively connected with the starting mass block, and the other end of each single cantilever folding beam is connected with the starting mass block One end is respectively connected with the vibration element bracket, and the vibration mass block is arranged in the center of the vibration element bracket. The preparation method adopts the processing technology of micro electro mechanical system, and the high temperature resistant material is manufactured into a vibration starting element by two times of "plating etching" technology. This scheme can effectively measure the vibration frequency data of objects under high temperature conditions, and has a wide range of application value.
[technical field]
The invention relates to a vibration starting element and a preparation method for a vibration sensor under high temperature conditions, belonging to the technical field of design and manufacture of a vibration sensor.
[background technology]
Vibration sensor is a key device in the test technology, which can receive and convert mechanical quantity into electrical quantity. It has a wide range of applications in industrial control, aerospace and other fields. With the demand of measuring vibration data in high temperature environment put forward by industrial technology, it is urgent to develop a vibration sensor that can withstand high temperature environment.
Fig. 1 is a structural diagram of a vibration sensor starting element disclosed in the prior art under high temperature, In this technical scheme, the cantilever beam is long and the area of the starting mass block is relatively small, which wastes a large space, so that the size of the whole vibration sensor is relatively large, which is not conducive to the miniaturization of the sensor; and the thickness of the cantilever beam and the starting mass block is greatly different, which increases At the same time, the deformation displacement value of the starting vibration mass will gradually change with the transverse direction under the vibration condition, which will have a greater impact on the stability of the measurement accuracy and increase the difficulty of calibration.
The purpose of the invention is to provide a vibration sensor starting element and a preparation method for the vibration sensor under high temperature conditions, so as to make the structure of the sensor more compact and further improve the stability of the measurement accuracy, so as to be able to effectively measure the vibration frequency data of the object under high temperature conditions.
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