IOTA
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Process division
Classified by synthetic raw materials and methods:
Ammonia hydrolysis method using chlorosilane as raw material: for example, dimethyl dichlorosilane is used as a representative, and it is reacted with ammonia in a suitable solvent (such as toluene) for ammonia hydrolysis. This is a common process for producing various silazanes. By controlling the reaction temperature, raw material concentration, and rate of ammonia gas injection during the reaction process, different polymerization degrees and structures of silazane products can be generated, such as octamethylcyclotetrasilazane, which is synthesized through this process.
Silicon containing hydroxyl compounds condensation method: using compounds containing silicon hydroxyl groups, such as dimethylsilanediol, to undergo condensation reaction under alkaline catalysts (such as sodium hydroxide, potassium hydroxide, etc.) to generate silazane. The key to this process lies in precise control of reaction conditions, including catalyst dosage, reaction temperature, reaction time, etc., in order to obtain the desired structure and performance of the silazane product.
Vapor deposition method: Select suitable gaseous precursors containing silicon and nitrogen elements, such as certain silicon amine compounds, and use chemical vapor deposition (CVD) or atomic layer deposition (ALD) techniques to decompose and react the precursors on the substrate surface under specific conditions such as high temperature and plasma, thereby generating silicon nitride thin films or coatings. It is commonly used in the preparation of functional silicon nitride materials in semiconductor, microelectronics, and other fields.
Classified by aggregation degree:
Cyclic silazane: Silazane is generally formed into a cyclic structure through specific reaction conditions, and common ones include hexamethylcyclotrimethylazane, octamethylcyclotetrasilazane, etc. The synthesis process of cyclic silazane often requires precise control of reaction parameters to ensure the size and regularity of the ring structure. The synthesis process has strict requirements for the purity of the raw materials, reaction temperature, and acidity or alkalinity of the reaction system.
Linear silazane: A chain like structure formed by connecting multiple silazane units through chemical bonds. Its synthesis process is different from that of cyclic silazane. Usually, in the condensation reaction, the length and structure of the chain are controlled by controlling the reaction degree and adding specific end capping agents to obtain linear silazane products that meet different application requirements.
