Scanning Electron Microscope (SEM)
Principle: By scanning the surface of the sample with a focused electron beam, signals such as secondary electrons and backscattered electrons are generated on the sample surface. These signals are collected by a detector and converted into image information, which can present the microstructure, roughness, particle size, distribution, and other characteristics of the sample surface.
Application example: For silicon nitride insulation layers, it is possible to observe whether the surface is flat, whether there are defects such as cracks and holes, and the changes in microstructure after different treatments (such as high temperature, irradiation, etc.). For example, studying whether the silicon nitride insulation layer cracks and becomes loose on the surface under high temperature conditions, and comparing SEM images after different temperature treatments, can intuitively analyze the changes in its structural stability.
Transmission Electron Microscope (TEM)
Principle: The electron beam passes through an ultra-thin sample and is magnified and focused by an electromagnetic lens to form an image. The internal microstructure of the sample can be observed, including atomic arrangement, lattice fringes, phase structure, etc. The resolution can reach the atomic level and provide more detailed microstructural information.
Application example: After preparing the silicon nitride insulating layer into ultra-thin slice samples, TEM can be used to analyze the aggregation state of its molecular chains, whether there are crystalline regions, and observe the microscopic defects inside. For example, after studying the composite modification of silazane (adding inorganic fillers, etc.), the dispersion of fillers in the silazane matrix can be observed through TEM to understand its interface bonding state with the matrix, and then analyze the influence of this composite structure on the micro properties and stability of the insulation layer.
Atomic Force Microscopy (AFM)
Principle: By scanning the sample surface with a probe, the interaction force between the probe and the atoms on the sample surface (such as van der Waals force) is utilized to obtain information on the morphology, roughness, hardness, and other properties of the sample surface. Additionally, the sample surface can be manipulated and measured at the nanoscale.
Application example: It can be used to detect the nanoscale roughness of silicon nitride insulation layer surface, as well as the changes in surface morphology under different environmental factors (such as humidity, chemical substance contact, etc.). For example, studying the effect of water molecule adsorption on the micro surface roughness of silicon nitride insulation layer in humid environment, real-time monitoring of surface height changes and other data through AFM, and analyzing the process of its microstructure being affected by humidity.
X-ray diffraction (XRD)
Principle: By irradiating a sample with X-rays, coherent scattering occurs when the X-rays interact with atoms in the sample, resulting in diffraction phenomena. By analyzing the peak position, peak intensity, peak shape, and other information in the diffraction pattern, the crystal structure, phase composition, and lattice parameters of the sample can be determined.
Application example: XRD can be used to determine the crystallization status and understand the internal crystal phase structure of silicon nitride insulation layers that contain crystalline components or may crystallize under certain conditions. For example, in studying whether there are new crystal phases generated or changes in the original crystal structure of silazane after adding specific inorganic fillers, the influence of this composite structure on the microscopic properties of the insulation layer can be inferred.
Infrared Spectroscopy Analysis (FTIR)
Principle: Different chemical bonds will produce characteristic absorption peaks under infrared light irradiation. By detecting the absorption of infrared light by the sample, analyzing the position, intensity, shape, etc. of the absorption peak, the types of chemical bonds and the distribution of functional groups in the sample can be determined, and its chemical structure can be inferred.
Application example: It can detect the presence of key chemical bonds such as silicon nitrogen bonds, silicon oxygen bonds, carbon hydrogen bonds, etc. in the silicon nitride insulation layer, as well as the changes in these chemical bonds after different treatments (such as thermal aging, chemical corrosion, etc.). For example, when studying the influence of humidity on silazane, FTIR is used to observe whether there are changes in the absorption peaks corresponding to hydrolysis reactions of silicon nitrogen bonds, etc., in order to determine whether hydrolysis reactions occur and to what extent, and to analyze the changes in its microstructure.
Raman spectroscopy analysis
Principle: Based on the scattering phenomenon of light, when laser is irradiated on the sample, the frequency of some scattered light will change, producing Raman scattering. Different chemical bonds and molecular vibration modes correspond to different Raman shifts. By analyzing Raman spectra, the molecular structure and chemical bond information of the sample can be understood.
Application example: Used to study the vibration characteristics of silicon nitride insulating layer molecules, such as analyzing the differences in vibration modes of silicon nitride chains in different polymerization states, or the changes in molecular vibration modes after being affected by external factors such as irradiation, in order to infer the changes in its microstructure during these processes and provide a basis for studying its stability.
Nuclear Magnetic Resonance (NMR) Analysis
Principle: By utilizing the spin properties of atomic nuclei in a magnetic field, when a radio frequency pulse is applied, the nuclei undergo energy level transitions and generate resonance signals. By analyzing these signals, detailed information about the chemical environment, connection mode, and molecular structure of atoms in the sample can be obtained.
Application example: For the silicon nitride insulating layer, the chemical environment of silicon atoms, nitrogen atoms, etc. in the molecule can be analyzed to understand their bonding situation and the structural characteristics of the molecular chain. For example, when studying the structural changes of silicon nitride after modification, NMR analysis is used to analyze the changes in the chemical environment around silicon and nitrogen atoms, determine the formation of new chemical bonds, and thus grasp the adjustment of its structure and its impact on stability at the microscopic level.
Small angle scattering (SAXS and SANS)
Principle: Small angle X-ray scattering (SAXS) uses the scattering of X-rays in a sample to study the nanoscale structural information inside the sample, such as the size, shape, distribution, and molecular aggregation state of nanoparticles; Small angle neutron scattering (SANS) is a similar scattering study using neutron beams, especially suitable for studying sample structures that are sensitive to neutron scattering, such as those containing hydrogen elements.
Application example: Small angle scattering technology has unique advantages in studying the dispersion of nano fillers in silicon nitride insulation layers and the aggregation morphology of molecular chains at the nanoscale. For example, analyzing the silicon nitride insulation layer with added nano silicon dioxide, understanding the aggregation state of silicon dioxide nanoparticles in the silicon nitride matrix and their interaction with the matrix through small angle scattering, and evaluating the influence of this composite structure on the performance and stability of the insulation layer from a microscopic perspective.
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